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%                                               
%            Shizuoka University 
%       ----KANEKO & YAMASHITA LAB.----
%        Author: TSUCHIYA, Toru
%     File Name: reidai11.tex
% Last Modified: Wed, 06 Jun 2007 17:09:58 +0900
%                                               
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\documentclass[a4j]{jarticle}
\begin{document}
\begin{table}[htbp]
\centering
\begin{tabular}[t]{|l|c|r|p{4cm}|}
\hline
試料番号 & \multicolumn{2}{c|}{スパッタ条件} & \hfill{}表面形態\hfill{} \\ \cline{2-3}
         & 圧力 [Pa]       & 温度 [K]        & \\ \hline
       1 & 10 & 300 & 黒色。ガサガサ。\\
       2 & 10 & 400 & 金属光沢。滑らか。\\
       3 & 20 & 300 & \\
       4 & 20 & 400 & 金属光沢。温度上昇のためか、粒界が見える。\\
 \hline
\end{tabular}
\end{table}
\end{document}
